ANSYS -MEMS:

                                       Files created by the 3D Modeler can be read into the ANSYS program. Once the

3D model is entered, it can be analyzed using any ANSYS finite element module.

In  this  tutorial,  you  will  perform  a  simple  structural  analysis  of  the  spring

mechanism on a lateral comb resonator. You will apply a small force on one end

of the device model. ANSYS will compute the resulting deflection. You will then

calculate the spring constant using Hooke’s law.